Indium Zinc Oxide/IZO (InZnO) Sputtering Targets, Indium
Purity: 99.99%, Size: 3”, Thickness: 0.125”
Sputtering is a proven technology capable of depositing thin films from a wide variety of materials onto diverse substrate shapes and sizes.
The process using sputter targets is repeatable and can be scaled up from small research and development projects. The process with sputter
targets can also be adapted for production batches involving medium to large substrate areas. Chemical reactions may occur on the target
surface, in-flight, or on the substrate depending on the process parameters. Although the numerous parameters make sputter deposition a
complex process, they provide experts with extensive control over film growth and microstructure.
Applications of Sputtering Targets;
Sputtering targets are used for film deposition. The deposition made by sputter targets is a method of depositing thin films by sputtering,
which involves eroding material from a “target” source onto a “substrate,” such as a silicon wafer.
Semiconductor sputtering targets are used to etch the target. Sputter etching is selected in situations requiring a high degree of etching
anisotropy where selectivity is not a concern.
Sputter targets are also used for analysis by etching away the target material.
One example occurs in secondary ion spectroscopy (SIMS), where the target sample is sputtered at a constant rate. As the target is sputtered,
the concentration and identity of sputtered atoms are measured using mass spectrometry. With the aid of the sputtering target, the composition
of the target material can be determined, and even extremely low concentrations of impurities can be detected.
Sputtering targets also have applications in space. Sputtering is one of the forms of space weathering, a process that alters the physical and
chemical properties of airless bodies, such as asteroids and the Moon.
