Boron Nitride (BN) Sputtering Target – Product Specification Table
| Parameter | Details |
|---|---|
| Product Name | Boron Nitride (BN) Sputtering Target |
| Purity | 99.5% |
| Size | 3” |
| Thickness | 0.125” |
| Material Description | BN is a heat- and chemically resistant refractory compound existing in hexagonal (h-BN) and cubic (c-BN) forms; used in high-temperature, protective, and precision coating applications |
Sputtering Process Description
| Process Detail | Description |
|---|---|
| Thin Film Deposition | Deposits thin films on various substrates with excellent uniformity |
| Scalability | Adaptable from R&D to medium and large-scale production |
| Reaction Zone | Chemical reactions may occur on target surface, in-flight, or on substrate |
| Process Control | Multiple controllable parameters allow precision over microstructure and growth |
Applications of Sputtering Targets
| Application Area | Description |
|---|---|
| Thin Film Deposition | Material is sputtered from the target onto substrates such as silicon wafers |
| Semiconductor Etching | Used for sputter etching where high anisotropy is required |
| Analytical Techniques (SIMS) | Enables detection of elemental composition and trace impurities |
| Space Weathering Studies | Used to simulate and analyze sputtering on Moon/asteroid surfaces |
Properties & Uses of Boron Nitride
| BN Form | Key Properties | Applications |
|---|---|---|
| Hexagonal BN (h-BN) | Soft, lubricating, low friction, thermally conductive, electrically insulating | Lubricants, metal forming dies, cosmetic additives, high-temperature applications |
| Cubic BN (c-BN) | Second hardest material after diamond, high thermal conductivity, high wear resistance, chemically stable at high temperature | Cutting tools, protective coatings, electrical insulation, optical coatings |
Coating & Industrial Applications
| Category | Details |
|---|---|
| Cutting Tools | c-BN coatings offer high hardness and stability for dry cutting, high-speed machining, and hard material cutting |
| Protective Coatings | BN films used in thermal protection and chemically harsh environments |
| Optical & Electrical Layers | High electrical resistivity and thermal stability make BN suitable for optical and insulating films |
| PVD Sputtering Advantages | Deposits thin or thick films, sharp edges, complex shapes, and requires lower coating temperatures |
