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| Application |
Details |
| Thin Film Deposition |
Material is eroded from the target onto substrates such as silicon wafers to form thin films. |
|
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Semiconductor EtchingUsed for sputter etching where high etching anisotropy is needed without selectivity concerns.
|
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Material Analysis (SIMS)Target is sputtered at a constant rate; mass spectrometry measures atom concentration and identity, enabling detection of trace impurities.
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| Space / Space Weathering |
Helps study physical and chemical changes on airless bodies, such as asteroids and the Moon. |
