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| Application |
Details |
| Thin Film Deposition |
Material is eroded from the target onto substrates such as silicon wafers to form thin films. |
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Semiconductor EtchingUsed in sputter etching when high anisotropy is required and selectivity is not a concern.
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Material Analysis (SIMS)Target is sputtered at a constant rate; mass spectrometry measures atom concentration and identity, detecting trace impurities.
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| Space / Space Weathering |
Helps study changes in physical and chemical properties of airless bodies like asteroids and the Moon. |
