Bismuth Oxide (Bi₂O₃) Sputtering Targets
Purity: 99.9% Size: 3” Thickness: 0.250”
Sputtering is a reliable technique for depositing thin films from a wide range of materials onto substrates of various shapes and sizes. The process is repeatable and scalable, suitable for both small research projects and medium-to-large production batches. Chemical reactions can occur on the target surface, in-flight, or on the substrate depending on process parameters, offering experts precise control over film growth and microstructure.
Applications
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Thin Film Deposition: Material is eroded from a target and deposited onto substrates like silicon wafers.
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Semiconductor Etching: Enables high anisotropy etching when selectivity is not critical.
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Material Analysis: Supports secondary ion mass spectrometry (SIMS) for precise composition and impurity detection.
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Space Applications: Contributes to space weathering, altering physical and chemical properties of airless bodies such as asteroids and the Moon.
Material Overview
Bismuth oxide (Bi₂O₃) is a key bismuth compound with notable optical and electrical properties:
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Large energy gap (2–4 eV)
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High refractive index
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Strong oxygen ion conductivity at medium and high temperatures
These properties make Bi₂O₃ suitable for:
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Optoelectronics
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Solar cells
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Solid oxide fuel cells (SOFCs)
Bi₂O₃ exists in several polymorphs (α, β, γ, δ), each with distinct crystal structures and properties. Only the α-phase (low-temperature monoclinic) and δ-phase (high-temperature face-centered cubic) are stable.
Magnetron sputtering is widely used due to high deposition rates, dense and adhesive films, and compatibility with large-area systems. Bi₂O₃-based materials have been applied in:
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Electrolytes for SOFCs and oxygen sensors
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Gas sensors and optical coatings
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Ceramic glass production
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Photocatalytic applications for water splitting and decontamination under visible light
Additionally, Bi-containing oxides exhibit high charge carrier mobility and long electron mean free paths, making them promising for microelectronics. Semi-metallic Bi thin films transition to semiconductors at thicknesses around 30 nm, enhancing their versatility in advanced applications.
