Antimony (Sb) Sputtering Targets
Purity: 99.95% Size: 2” Thickness: 0.250”
Antimony sputtering targets are engineered for high-precision thin-film deposition across a wide range of substrate types and geometries. The sputtering process is highly repeatable and scalable, supporting both small research applications and medium-to-large production environments. Depending on process parameters, chemical interactions may occur on the target surface, during particle transit, or directly on the substrate, offering experts substantial control over film growth, microstructure, and material performance.
Applications of Sputtering Targets
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Thin-film deposition: Material is eroded from the target and deposited onto substrates such as silicon wafers.
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Semiconductor etching: Selected when high anisotropy is required and selectivity is less critical.
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Materials analysis: Used in etching-based techniques to remove material for testing.
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Secondary Ion Mass Spectrometry (SIMS): Continuous sputtering allows measurement of sputtered atoms, enabling precise compositional analysis and detection of trace impurities.
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Space applications: Sputtering contributes to space weathering on airless bodies such as the Moon and asteroids.
About Antimony (Sb)
Antimony (atomic number 51) is a bluish-white metalloid in Group 15, chemically similar to arsenic but without the same toxicity profile. Its crustal abundance ranges between 0.2 and 0.5 ppm. Known for strong fire-retardant properties, antimony sputtering targets are widely used in flame-resistant coatings.
Antimony-based thin films are also valuable in optoelectronic and photonic technologies, including:
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LEDs
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Laser diodes
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Photodiodes
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Solar cells
In semiconductor manufacturing, antimony is frequently used as a dopant in n-type silicon wafers, supporting applications such as infrared detectors, Hall-effect devices, and diode fabrication.
Antimony also forms functional alloys with elements such as tin. When combined with indium—such as in indium antimony oxide—it serves as a sputtering material for producing transparent conductive films, useful in display and photovoltaic applications.
