Prime Si+Si3N4 Wafer
Size: 4”, Orientation: (100), Boron Doped, Thickness: 525± 25 μm, Coating 150 nm
Technical Properties:
| Resistivity (ohm.cm) |
|
| 1-10 |
|
Description
Silicon nitride (Si3N4, SiN) provides exceptional mechanical and thermal stability.
It is commonly used for hard masks, dielectric layers, and passivation coatings.
Silicon nitride is naturally hard and offers excellent thermal shock resistance and oxidation resistance.
It also exhibits high-temperature strength, creep resistance, and oxidation durability.
Its low thermal expansion coefficient ensures strong thermal shock resistance.
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Download ……………………….. MSDS