Prime Si+Si3N4 Wafer
Size: 4”, Orientation: (100), Arsenic Doped, Thickness: 525± 25 μm
Technical Properties:
| Resistivity (ohm.cm) |
|
| 0,001-0,005 |
|
Description
Silicon nitride (Si3N4, SiN) delivers outstanding mechanical and thermal stability.
It is commonly applied as hard masks, dielectric layers, or passivation coatings.
Silicon nitride is inherently hard and exhibits strong thermal shock and oxidation resistance.
It also maintains high-temperature strength, creep resistance, and oxidation durability.
Its low thermal expansion coefficient provides excellent resistance to thermal shock.
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Download ……………………….. MSDS