Prime Si+Si3N4 Wafer
Size: 3”, Orientation: (100), Boron Doped, Thickness: 381± 25 μm, Coating 150 nm
Technical Properties:
| Resistivity (ohm.cm) |
|
| 1-10 |
|
Description
Silicon nitride (Si3N4, SiN) provides exceptional mechanical and thermal stability.
It is frequently used for hard masks, dielectric layers, and passivation applications.
Silicon nitride is naturally hard and offers strong thermal shock resistance and oxidation resistance.
It also maintains high-temperature strength, creep resistance, and oxidation resistance.
Its low thermal expansion coefficient contributes to excellent thermal shock resistance.
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Download ……………………….. MSDS