Cerium Oxide (CeO2) Sputtering Targets
| Property | Specification |
|---|---|
| Purity | 99.99% |
| Size | 3” |
| Thickness | 0.125” |
Description
Sputtering is a proven technology capable of depositing thin films from a wide variety of materials onto diverse substrate shapes and sizes. The process with sputter targets is repeatable and can be scaled up from small research and development projects. The process with sputter targets can be adapted to production batches involving medium to large substrate areas. The chemical reaction can occur on the target surface, in-flight, or on the substrate depending on process parameters. These multiple parameters make sputter deposition a complex process but allow experts a high degree of control over the growth and microstructure of the deposited area.
Applications of Sputtering Targets
Sputtering targets are used for film deposition. The deposition achieved by sputter targets is a method of depositing thin films by sputtering, which involves eroding material from a “target” source onto a “substrate,” such as a silicon wafer.
Semiconductor sputtering targets are used to etch the target. Sputter etching is selected in cases where a high degree of etching anisotropy is required and selectivity is not a concern.
Sputter targets are also used for analysis by etching away the target material. One example is secondary ion mass spectroscopy (SIMS), where the target sample is sputtered at a constant rate. As the target is sputtered, the concentration and identity of sputtered atoms are measured using mass spectrometry. Using the sputtering target, the composition of the target material can be determined, and even extremely low concentrations of impurities can be detected.
Sputtering targets also have applications in space. Sputtering is one form of space weathering, a process that changes the physical and chemical properties of airless bodies, such as asteroids and the Moon.
Cerium is a member of the lanthanide series of metals and is the most abundant of the rare-earth elements in the earth’s crust. Cerium oxide is useful in various optical and electronic applications due to its high refractive index and dielectric constant. For corrosion-protective coatings, cerium oxide can be chosen as an alternative to chromate-based coatings.
Cerium oxide is an inexpensive and highly studied material, widely used in many applications such as polishing materials, automotive exhaust catalysts, gas sensors, electrolyte materials, oxygen storage, and oxide fuel cells. It is suitable for microelectronics, as well as various optical, electro-optical, and optoelectronic devices, due to its unique properties, including moderate band gap, high refractive index, and high dielectric constant.
