Barium Strontium Titanate (BaO4SrTi) Sputtering Targets, elastomer
Purity: 99.99%, Size: 4”, Thickness: 0.250”
Sputtering is a proven technology capable of depositing thin films onto a wide variety of materials and substrate shapes. The process using sputter targets is repeatable and can be scaled from small research and development projects to production batches involving medium to large substrate areas. Chemical reactions may occur on the target surface, in-flight, or on the substrate, depending on process parameters. Although sputter deposition involves many variables and is a complex process, it provides experts with substantial control over film growth and microstructure.
Applications of Sputtering Targets;
Sputtering targets are used for film deposition. The deposition made by sputter targets is a method of depositing thin films through sputtering that involves eroding material from a “target” source onto a “substrate” such as a silicon wafer.
Semiconductor sputtering targets are used to etch the target. Sputter etching is preferred in cases where a high degree of etching anisotropy is required and selectivity is not a concern.
Sputter targets are also used for analysis by etching away target material.
One example occurs in secondary ion spectroscopy (SIMS), where the target sample is sputtered at a constant rate. As the target is sputtered, the concentration and identity of sputtered atoms are measured using mass spectrometry. Through this sputtering approach, the composition of the target material can be determined, and even extremely low impurity concentrations can be detected.
Sputtering targets also have applications in space. Sputtering is one of the forms of space weathering, a process that alters the physical and chemical properties of airless bodies such as asteroids and the Moon.
Barium strontium titanate (BST) is a solid solution of barium titanate (BaTiO3) and strontium titanate (SrTiO3). Barium strontium titanate (BST) thin films obtained by sputtering methods provide excellent dielectric properties to materials. Because of this, BST-based ferroelectric thin-film devices have become popular over the last decade due to their versatile applications in tunable microwave devices such as delay lines, resonators, phase shifters, and varactors.
Barium strontium titanate thin films are promising candidates because of their high dielectric constant, tunability, and low dielectric loss. Dielectric-tunable properties of BST films deposited by various techniques have been reported, examining the effects of factors such as oxygen vacancies, film thickness, grain size, Ba/Sr ratio, and more. Researchers have also explored doping concentrations, high-temperature annealing, and multilayer structures to achieve higher tunability and lower dielectric loss.
