|
| Application |
Details |
| Thin Film Deposition |
Material is eroded from the target onto substrates such as silicon wafers to form thin films. |
|
| Semiconductor Etching |
Used in sputter etching for processes requiring high anisotropy where selectivity is not critical. |
|
Material Analysis (SIMS)Target is sputtered at a constant rate; mass spectrometry measures atom concentration and identity, detecting even trace impurities.
|
| Space / Space Weathering |
Helps study changes in physical and chemical properties of airless bodies like asteroids and the Moon. |
