|
| Application Area |
Details |
| Thin Film Deposition |
Material from the target is eroded onto substrates such as silicon wafers to form thin films. |
|
| Semiconductor Etching |
Used in sputter etching for high anisotropy processes where selectivity is not critical. |
|
Material Analysis (SIMS)Target is sputtered at a constant rate; mass spectrometry measures atom concentration and identity, detecting trace impurities.
|
| Space / Space Weathering |
Studies changes in physical and chemical properties of airless bodies such as asteroids and the Moon. |
